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A Penning Discharge Source For Extreme Ultraviolet Calibration

Authors :
Stuart Bowyer
Patrick N. Jelinsky
Roger F. Malina
David S. Finley
Source :
SPIE Proceedings.
Publication Year :
1986
Publisher :
SPIE, 1986.

Abstract

A Penning discharge lamp for use in the calibration of instruments and components for the extreme ultraviolet has been developed. This source is sufficiently light and compact to make it suitable for mounting on the movable slit assembly of a grazing incidence Rowland circle monochromator. Because this is a continuous discharge source, it is suitable for use with photon counting detectors. Line radiation is provided both by the gas and by atoms sputtered off the interchangeable metal cathodes. Usable lines are produced by species as highly ionized as Ne IV and Al V. The wavelength coverage provided is such that a good density of emission lines is available down to wavelengths as short as 100A. This source fills the gap between 100 and 300A, which is inadequately covered by the other available compact continuous radiation sources.

Details

ISSN :
0277786X
Database :
OpenAIRE
Journal :
SPIE Proceedings
Accession number :
edsair.doi...........855ee5bde21901f724970c440b47fc0f
Full Text :
https://doi.org/10.1117/12.936557