Density determination of silver neodecanoate, tungsten hexacarbonyl, and a series of metal acetylacetonates and hexafluoroacetylacetonates

The densities of a series of metal-organic compounds potentially suitable for metal-organic chemical vapor deposition, MOCVD, formation of metal interconnection films, were determined using a gas pycnometer which measures the pressure change when a gas (helium) is allowed to expand in the presence of a solid material whose density is to be determined. The solid material is contained in a calibrated chamber. Using the ideal gas equation, the volume of the solid material can be calculated, and thus it’s density. Densities are reported for silver neodecanoate, tungsten hexacarbonyl, and metal acetylacetonates and hexafluoroacetylacetonates of aluminum, chromium, cobalt, copper, magnesium, nickel, palladium, platinum, rhodium, and zinc.