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Self-Cleaning Femtosecond Laser Micromachining of Grooves on Silicon: Effect of Solvent Immersion
- Source :
- 2017 IEEE Workshop on Recent Advances in Photonics (WRAP).
- Publication Year :
- 2017
- Publisher :
- IEEE, 2017.
-
Abstract
- In micromachining, the extruded material is redeposited back on the structured surface. In this work, we report on the advantages and results of fs laser-based surface micromachining of methanol immersed of Si comparing the same with the ambient air.
Details
- Database :
- OpenAIRE
- Journal :
- 2017 IEEE Workshop on Recent Advances in Photonics (WRAP)
- Accession number :
- edsair.doi...........84e6af1f804b253da3cc455aa92143f8
- Full Text :
- https://doi.org/10.1109/wrap.2017.8468561