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Nonequilibrium incorporation of impurities during rapid solidification
- Source :
- Journal of Crystal Growth. 48:379-382
- Publication Year :
- 1980
- Publisher :
- Elsevier BV, 1980.
-
Abstract
- Laser annealing of silicon in the pulsed, high energy density mode results in melting and rapid epitaxial resolidification. The incorporation of dopant atoms in the resultant crystals in excess of the retrograde solubility maximum provides firm evidence for the occurence of nonequilibrium, impurity trapping processes at the solid-liquid interface during crystal growth.
- Subjects :
- Materials science
Silicon
Dopant
chemistry.chemical_element
Non-equilibrium thermodynamics
Crystal growth
Trapping
Condensed Matter Physics
Epitaxy
Inorganic Chemistry
Condensed Matter::Materials Science
Crystallography
chemistry
Chemical physics
Impurity
Condensed Matter::Superconductivity
Materials Chemistry
Solubility
Subjects
Details
- ISSN :
- 00220248
- Volume :
- 48
- Database :
- OpenAIRE
- Journal :
- Journal of Crystal Growth
- Accession number :
- edsair.doi...........847a78602984ff0d0b9469426ba275fe
- Full Text :
- https://doi.org/10.1016/0022-0248(80)90032-9