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Nonequilibrium incorporation of impurities during rapid solidification

Authors :
Harry J. Leamy
John C. Bean
J. M. Poate
George K. Celler
Source :
Journal of Crystal Growth. 48:379-382
Publication Year :
1980
Publisher :
Elsevier BV, 1980.

Abstract

Laser annealing of silicon in the pulsed, high energy density mode results in melting and rapid epitaxial resolidification. The incorporation of dopant atoms in the resultant crystals in excess of the retrograde solubility maximum provides firm evidence for the occurence of nonequilibrium, impurity trapping processes at the solid-liquid interface during crystal growth.

Details

ISSN :
00220248
Volume :
48
Database :
OpenAIRE
Journal :
Journal of Crystal Growth
Accession number :
edsair.doi...........847a78602984ff0d0b9469426ba275fe
Full Text :
https://doi.org/10.1016/0022-0248(80)90032-9