A self-consistent one-dimensional modeling and simulation of solenoidal inductively coupled plasma discharge

MLA

N.S. Yoon, et al. “A Self-Consistent One-Dimensional Modeling and Simulation of Solenoidal Inductively Coupled Plasma Discharge.” Surface and Coatings Technology, vol. 114, Apr. 1999, pp. 60–64. EBSCOhost, https://doi.org/10.1016/s0257-8972(99)00022-5.

APA

N.S. Yoon, K.-I. You, & S.M. Hwang. (1999). A self-consistent one-dimensional modeling and simulation of solenoidal inductively coupled plasma discharge. Surface and Coatings Technology, 114, 60–64. https://doi.org/10.1016/s0257-8972(99)00022-5

Chicago

N.S. Yoon, K.-I. You, and S.M. Hwang. 1999. “A Self-Consistent One-Dimensional Modeling and Simulation of Solenoidal Inductively Coupled Plasma Discharge.” Surface and Coatings Technology 114 (April): 60–64. doi:10.1016/s0257-8972(99)00022-5.