Wear Reduction Method for Frictionally Fast Feeding Piezoactuator

A new wear reduction method, which is based on a static friction without slipping, is developed for a frictionally fast feeding piezoactuator. This method is required for overcoming the problems related to the scattering of particles due to the use of a contact type actuator. Furthermore, wear reduction result in a frictionally driving actuator with a long-term stability for various applications, such as the electron beam inspection in the next-generation semiconductor industry.