Adsorption of residual trace impurities in UPW onto wafer surface

Subjects

Subjects :

Trace (semiology)
Adsorption
Materials science
Impurity
Inorganic chemistry
Wafer
Residual

Details

Database :

OpenAIRE

Journal :

2003 5th International Conference on ASIC. Proceedings (IEEE Cat. No.03TH8690)

Accession number :

edsair.doi...........832c7af8fd9b726150589e23bb079ed4

Full Text :

https://doi.org/10.1109/issm.2003.1243329