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Plasma-enhanced atomic layer deposition of superconducting niobium nitride
- Source :
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 35:01B143
- Publication Year :
- 2017
- Publisher :
- American Vacuum Society, 2017.
-
Abstract
- Thin films of niobium nitride are useful for their physical, chemical, and electrical properties. NbN superconducting properties have been utilized in a wide range of applications. Plasma-enhanced atomic layer deposition (PEALD) of NbN with (t-butylimido) tris(diethylamido) niobium(V) and remote H2/N2 plasmas has been investigated. Deposited film properties have been studied as a function of substrate temperature (100–300 °C), plasma power (150–300 W), and H2 flow rate (10–80 sccm). PEALD NbN films were characterized with spectroscopic ellipsometry (thickness, optical properties), four point probe (resistivity), x-ray photoelectron spectroscopy (composition), x-ray reflectivity (density and thickness), x-ray diffraction (crystallinity), and superconductivity measurements. Film composition varied with deposition conditions, but larger cubic NbN crystallites and increased film density at higher substrate temperatures and H2 flow rates lead to room temperature resistivity values as low as 173 μΩ cm and super...
- Subjects :
- Niobium nitride
Materials science
Analytical chemistry
Niobium
chemistry.chemical_element
02 engineering and technology
Surfaces and Interfaces
Substrate (electronics)
021001 nanoscience & nanotechnology
Condensed Matter Physics
01 natural sciences
Surfaces, Coatings and Films
chemistry.chemical_compound
Crystallinity
Atomic layer deposition
chemistry
X-ray photoelectron spectroscopy
Electrical resistivity and conductivity
0103 physical sciences
Thin film
010306 general physics
0210 nano-technology
Subjects
Details
- ISSN :
- 15208559 and 07342101
- Volume :
- 35
- Database :
- OpenAIRE
- Journal :
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- Accession number :
- edsair.doi...........825e9c7e5e213b08ffc8a18263c85756