PC‐based digital apparatus with temperature compensation for measurement of thin films during deposition

We present an apparatus for controlling the deposition of thin films. The apparatus is based on a quartz resonator whose frequency is controlled digitally by a computer. Temperature variations of the quartz during the evaporation process, attributed to the exothermic heat of condensation and radiation heating from the evaporation source, are compensated. A very stable deposition rate and a good film thickness evaluation are obtained.