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Observation of strained SiGe nanoislands embedded in a Si matrix using ambient cross-sectional atomic force microscopy

Authors :
Z F Krasilnik
A. V. Novikov
D N Lobanov
M. S. Dunaevskii
R. Laiho
A. N. Titkov
Source :
Microscopy of Semiconducting Materials 2003 ISBN: 9781351074636, Microscopy of Semiconducting Materials 2003
Publication Year :
2018
Publisher :
CRC Press, 2018.

Details

ISBN :
978-1-351-07463-6
ISBNs :
9781351074636
Database :
OpenAIRE
Journal :
Microscopy of Semiconducting Materials 2003 ISBN: 9781351074636, Microscopy of Semiconducting Materials 2003
Accession number :
edsair.doi...........8138cb0a9f30126e0607b9e5b512f715
Full Text :
https://doi.org/10.1201/9781351074636-28