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Low energy neutral spectroscopy during pulsed discharge cleaning in PLT
- Source :
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 1:818-821
- Publication Year :
- 1983
- Publisher :
- American Vacuum Society, 1983.
-
Abstract
- The efflux of neutral hydrogen from PLT during discharge cleaning has been measured using a time‐of‐flight spectrometer. During high ionization pulsed discharge cleaning (PDC), the flux in the energy range of 5 to 1000 eV varies from 1014 H0/cm2⋅s to 1016 H0/cm2⋅s and the average energy from 10 to 80 eV. The energy distributions are nearly single temperature Maxwellians. Low ionization PDC (Taylor‐type) produces a 1000 times lower fluence in the same energy range; however, a flux of 1016 H°/cm2⋅s at energies less than 5 eV is inferred. The detailed submillisecond time variation of these parameters with the fill gas pressure and state of cleanliness of the machine is presented. Comparisons with UV spectroscopy, bolometric measurements, and residual gas analysis are made.
- Subjects :
- Range (particle radiation)
Hydrogen
Spectrometer
Residual gas analyzer
Physics::Instrumentation and Detectors
Analytical chemistry
chemistry.chemical_element
Flux
Surfaces and Interfaces
Condensed Matter Physics
Fluence
Surfaces, Coatings and Films
chemistry
Ionization
Atomic physics
Spectroscopy
Subjects
Details
- ISSN :
- 15208559 and 07342101
- Volume :
- 1
- Database :
- OpenAIRE
- Journal :
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- Accession number :
- edsair.doi...........808c04de2970ea9dd33e1710d8568a75
- Full Text :
- https://doi.org/10.1116/1.572002