Gaseous Phase Study of the Zr-Organometallic ALD Precursor TEMAZ by Mass Spectrometry

Authors :: Mickael Gros-Jean
Christian Chatillon
Denis Monnier
Fabien Volpi
Ioana Nuta
Elisabeth Blanquet
Source :: Journal of The Electrochemical Society. 156:H71
Publication Year :: 2009
Publisher :: The Electrochemical Society, 2009.

Subjects :: Materials science
Renewable Energy, Sustainability and the Environment
Phase (matter)
Materials Chemistry
Electrochemistry
Analytical chemistry
Condensed Matter Physics
Mass spectrometry
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials

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