Back to Search Start Over

Investigation on Evolution of Oxygen Precipitates in Bonded SOI Substrate

Authors :
Xing Wei
Zeng-Feng Di
Xin Su
Chen Meng
Xu Hongtao
Nan Gao
Source :
ECS Journal of Solid State Science and Technology. 8:P186-P189
Publication Year :
2019
Publisher :
The Electrochemical Society, 2019.

Subjects

Subjects :
Materials science
Chemical engineering
Oxygen precipitates
Soi substrate
Electronic, Optical and Magnetic Materials

Details

ISSN :
21628777 and 21628769
Volume :
8
Database :
OpenAIRE
Journal :
ECS Journal of Solid State Science and Technology
Accession number :
edsair.doi...........80472c4e7ab75e92d2a7fce3e3b9ab60
Full Text :
https://doi.org/10.1149/2.0081903jss
Full Text Access
View/download PDF

Tools

Authors Abstract Subjects Details