Back to Search Start Over

Productivity improvement by module life extension with software approach using Availability MAXimization (AMAX) functionality

Authors :
Futoshi Sato
Taku Yamazaki
Toshihiro Oga
Sophia Hu
Source :
Optical Microlithography XXXII.
Publication Year :
2020
Publisher :
SPIE, 2020.

Subjects

Subjects :
Life extension
Software
business.industry
Computer science
AMAX
Maximization
business
Productivity
Industrial engineering

Details

Database :
OpenAIRE
Journal :
Optical Microlithography XXXII
Accession number :
edsair.doi...........803aa5a6597b9d8d897163fd5ec687cb
Full Text :
https://doi.org/10.1117/12.2515589
Full Text Access
View/download PDF

Tools

Authors Abstract Subjects Details