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Plasma effects in picosecond-femtosecond UV laser ablation of polymers

Authors :
J. Ihlemann
F. Beinhorn
Jürgen Troe
Klaus Luther
Source :
Applied Physics A. 79:869-873
Publication Year :
2004
Publisher :
Springer Science and Business Media LLC, 2004.

Abstract

Laser ablation of polyimide (PI) and polymethyl-methacrylate (PMMA) at 248 nm with pulse lengths τ ranging from 200 fs to 200 ps was investigated. The measured ablation rates show minima for pulse lengths of about 5 ps (PMMA) or 50 ps (PI).

Details

ISSN :
14320630 and 09478396
Volume :
79
Database :
OpenAIRE
Journal :
Applied Physics A
Accession number :
edsair.doi...........7ef93244626cab54bddad3f369ed12a1
Full Text :
https://doi.org/10.1007/s00339-004-2587-0