An opto-mechatronic magnetic field microsensor

An opto-mechatronic microsensor based on fiber Bragg grating technology for sensing magnetic field strength is developed and tested. The device is fabricated using low temperature silicon-based MEMS compatible technologies. A uniform Fe/Ni layer and embedded Fe/Ni flaps are deposited on the elastic membrane respectively that are actuated by external magnetic field for evaluating sensitivity. The Bragg wavelength shift of 0.37 nm was measured at the distance of 0.32 mm between the microsensor and a magnet with flux density of 1.12 T.