The study of multilayer anti-reflection coating in InSb focal plane detector

In manufacturing of InSb focal plane detector, InSb chip have to be polished from backside to reduce its thickness and then be plated a layer of coating to decrease its reflection (enhance its transmittance) for infrared ray. Moreover, the anti-reflection coating has to be multilayer for more anti-reflection bandwidth. In this article, it is introduced that the optimal design of triple layer λ/4 anti-reflection coating——the anodic oxide, SiNx and MgF2. The best thickness range of each layer and its theoretical reflective index are calculated from simulation software, until the refractive index of each layer has been measured by ellipsometer. And then the transmissivity and reflectivity of the triple layer coating are measured for testing and verifying its performance on the transmittance and reflection. In the end, the anti-reflective effect of the triple layer coating and monolayer SiNx coating are respectively measured and compared by infrared focal plane array measurement system. And it is showed that this triple layer coating achieved more anti-reflection bandwidth and better anti reflective effect.