The High-Efficient Low-Cost Wheel-Grinding Technology for CVD Diamond Films

CVD diamond films have been used in many high-tech fields with the industrial and scientific developments, while the lagging of the polishing technology for the CVD diamond films has limited their widely applications. This paper presents a high-efficient low-cost wheel-grinding technology for CVD diamond polishing, and the two key techniques of this technology are introduced in detail based on thermo-chemical polishing technology. Furthermore, wheel grinding technology exhibits a promising perspective for the widely application in the diamond films.