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Origin of the Internal Stress Around the Micropipe of 6H-SiC Single Crystal

Authors :
Tomohisa Kato
Hitoshi Ohsato
Takashi Okuda
Source :
Materials Science Forum. :449-452
Publication Year :
2000
Publisher :
Trans Tech Publications, Ltd., 2000.

Details

ISSN :
16629752
Database :
OpenAIRE
Journal :
Materials Science Forum
Accession number :
edsair.doi...........7dd71c3c7f91b4f58b61ea1a799686f3
Full Text :
https://doi.org/10.4028/www.scientific.net/msf.338-342.449