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25nm 64Gb MLC NAND technology and scaling challenges invited paper

Authors :
Krishna K. Parat
Kirk D. Prall
Source :
2010 International Electron Devices Meeting.
Publication Year :
2010
Publisher :
IEEE, 2010.

Abstract

A highly manufacturable 25nm 64Gb NAND technology has been developed. Many physical and electrical scaling challenges were overcome. Severe scaling challenges have to be overcome to continue NAND scaling.

Details

Database :
OpenAIRE
Journal :
2010 International Electron Devices Meeting
Accession number :
edsair.doi...........7d4ce9d8616df06b97fb2e805bf3b0ab