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25nm 64Gb MLC NAND technology and scaling challenges invited paper
- Source :
- 2010 International Electron Devices Meeting.
- Publication Year :
- 2010
- Publisher :
- IEEE, 2010.
-
Abstract
- A highly manufacturable 25nm 64Gb NAND technology has been developed. Many physical and electrical scaling challenges were overcome. Severe scaling challenges have to be overcome to continue NAND scaling.
Details
- Database :
- OpenAIRE
- Journal :
- 2010 International Electron Devices Meeting
- Accession number :
- edsair.doi...........7d4ce9d8616df06b97fb2e805bf3b0ab