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Direct‐Patterning ZnO Deposition by Atomic‐Layer Additive Manufacturing Using a Safe and Economical Precursor

Details

ISSN :
16136829 and 16136810
Database :
OpenAIRE
Journal :
Small
Accession number :
edsair.doi...........7d3c615fc7e5a8e532af96c9e3218fca
Full Text :
https://doi.org/10.1002/smll.202301774