Self-Assembled Si Quantum-Ring Structures on a Si Substrate by Plasma-Enhanced Chemical Vapor Deposition Based on a Growth-Etching Competition Mechanism

Authors :: Xin Fan Huang
Xue Fei Li
Jun Xu
Mu Wang
K. J. Chen
Lin Wei Yu
Hong Min Li
Wei Li
Jie Song
Source :: Advanced Materials. 19:1577-1581
Publication Year :: 2007
Publisher :: Wiley, 2007.

Subjects :: Materials science
Hybrid physical-chemical vapor deposition
Mechanical Engineering
Ion plating
Combustion chemical vapor deposition
Electron beam physical vapor deposition
Pulsed laser deposition
Chemical engineering
Mechanics of Materials
Etching (microfabrication)
Chemical physics
Plasma-enhanced chemical vapor deposition
General Materials Science
Plasma processing

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