Toward Advanced High‐ k and Electrode Thin Films for DRAM Capacitors via Atomic Layer Deposition

Authors :: Se Eun Kim
Ju Young Sung
Jae Deock Jeon
Seo Young Jang
Hye Min Lee
Sang Mo Moon
Jun Goo Kang
Han Jin Lim
Hyung‐Suk Jung
Sang Woon Lee
Source :: Advanced Materials Technologies. :2200878
Publication Year :: 2022
Publisher :: Wiley, 2022.

Subjects :: Mechanics of Materials
General Materials Science
Industrial and Manufacturing Engineering

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