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Electrical Breakdown in Advanced Interconnect Dielectrics
- Source :
- Advanced Interconnects for ULSI Technology
- Publication Year :
- 2012
- Publisher :
- Wiley, 2012.
Details
- Database :
- OpenAIRE
- Journal :
- Advanced Interconnects for ULSI Technology
- Accession number :
- edsair.doi...........7c45da6ab1f1d2d200fad72995341cf7