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Electrical Breakdown in Advanced Interconnect Dielectrics

Authors :
Ennis T. Ogawa
Oliver Aubel
Source :
Advanced Interconnects for ULSI Technology
Publication Year :
2012
Publisher :
Wiley, 2012.

Subjects

Subjects :
Interconnection
Materials science
business.industry
Gate dielectric
Electrical breakdown
Electrical engineering
Dielectric
business
Engineering physics

Details

Database :
OpenAIRE
Journal :
Advanced Interconnects for ULSI Technology
Accession number :
edsair.doi...........7c45da6ab1f1d2d200fad72995341cf7

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Authors Abstract Subjects Details