A high-resolution imaging detector for VUV applications

Authors :: Reinhold Henneck
Jacek Bialkowski
Alex Zehnder
O. H. W. Siegmund
A. Mchedlishvili
R. Martini
P. Bühler
Source :: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 387:50-52
Publication Year :: 1997
Publisher :: Elsevier BV, 1997.
Abstract: The VUV (30–1200A) detector described consists of a compact ‘Micro-Channel-Plate-Wedge-and-Strip anode’ imaging system and of the corresponding data read-out electronics with 32 Mbyte of memory. The performance of this space qualified detector system was measured in the FUV. We obtained a spatial resolution of about 70 μm over the full detector area of ∼7 cm 2 . Image distortions are small and can easily be corrected for. Detector efficiency depends on the choice of photo-cathode and ranges between 50% in the FUV up to 90% in the EUV.

Subjects :: Physics
Nuclear and High Energy Physics
Optics
business.industry
Extreme ultraviolet lithography
Resolution (electron density)
Detector
Electronics
business
Instrumentation
Image resolution
Anode

ISSN :: 01689002
Volume :: 387
Database :: OpenAIRE
Journal :: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Accession number :: edsair.doi...........7c2d36b997672ca5c7a5b5565f414c48
Full Text :: https://doi.org/10.1016/s0168-9002(97)85187-x