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Flash Lamp Annealing (FLA) of Magnetron Sputtered Low-Temperature TCO Coatings

Authors :
Andreas N. Panckow
Clement David
Jörg Weber
Source :
Vakuum in Forschung und Praxis. 29:21-25
Publication Year :
2017
Publisher :
Wiley, 2017.

Subjects

Subjects :
010302 applied physics
Flash-lamp
Materials science
Annealing (metallurgy)
0103 physical sciences
Cavity magnetron
Metallurgy
02 engineering and technology
021001 nanoscience & nanotechnology
0210 nano-technology
Condensed Matter Physics
01 natural sciences
Surfaces, Coatings and Films

Details

ISSN :
0947076X
Volume :
29
Database :
OpenAIRE
Journal :
Vakuum in Forschung und Praxis
Accession number :
edsair.doi...........7be28bcb00681ea73264ea77b7b102c2

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