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Chemical vapor deposition of nanocrystalline graphene directly on arbitrary high-temperature insulating substrates

Authors :
August Yurgens
Kenneth B. K. Teo
Matthew T. Cole
Niclas Lindvall
Jie Sun
Source :
NEMS
Publication Year :
2012
Publisher :
IEEE, 2012.

Abstract

Large area uniform nanocrystalline graphene is grown by chemical vapor deposition on arbitrary insulating substrates that can survive ∼1000 °C. The as-synthesized graphene is nanocrystalline with a domain size in the order of ∼10 nm. The material possesses a transparency and conductivity similar to standard graphene fabricated by exfoliation or catalysis. A noncatalytic mechanism is proposed to explain the experimental phenomena. The developed technique is scalable and reproducible, compatible with the existing semiconductor technology, and thus can be very useful in nanoelectronic applications such as transparent electronics, nanoelectromechanical systems, as well as molecular electronics.

Details

Database :
OpenAIRE
Journal :
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Accession number :
edsair.doi...........7bbed74d5a1d195469f7a7cfc1f0223d
Full Text :
https://doi.org/10.1109/nems.2012.6196711