Periodic Nano-Structure Formation with Femtosecond Laser Ablation and Patterning of Silicon

Regular micro-apparatus which covered with periodic nano-hole, nano-ridge and ripple structures on silicon bulk were formed by laser micro-machining with tightly focused beam of the femtosecond laser with wavelength of 800 nm, repetition rate of 1 kHz and the pulse length of 130 fs in air. The periodic nano-hole structures which focus with a 20× focusing objective lens (NA = 0.4) is reported. Investigating the relationship between the width of structures and the speed of processing.