A Method Study on Assembly of Single-Wall Carbon Nanotube Field Effect Transistor Using Dielectrophoresis

Single-wall carbon nanotubes are candidates for a number of building blocks in nanoscale electronics. With respect to the assembly of carbon nanotube field effect transistor, the dielectrophoresis technology is adopted, which assembles SWCNTs between the micro-electrodes, SWCNTs are affected by the electrophoretic force which is carried out by the related theoretical analysis in a nonuniform electric field. The driving electric field of dielectrophoresis is simulated by the comsol software. According to the simulation results, a number of the experiments are done. It turns out that the required experimental parameters of the efficient assembly of SWCNT were obtained. AFM scanning and electrical properties of SWCNTs show that the method can achieve the effective assembly of carbon nanotube field effect transistor. SWCNTs are driven in the microelectrode gap, having a good arrangement of uniform orientation and assembly results, and proportional to the arrangement density along the electrode width direction and the duration of DEP. Meanwhile, it also provides an effective method of assembly and manufacture for other one-dimensional nanomaterials assembly of nanoelectronic devices.