Internet remote microscope

The MIT remote microscope is a telemicroscopy system that allows users to remotely control and view a microscope over the internet with a graphical interface that runs on an ordinary workstation computer. The microscope server consists of an automated Zeiss microscope that is controlled by a personal computer, while the client interface is implemented with custom software developed at MIT. The system was designed primarily to provide remote inspection capabilities for semiconductor researchers during the remote fabrication of integrated circuits, but can also be used as a general purpose instrument for remote inspections. The remote microscope also allows any number of clients to simultaneously view the microscope in a conference inspection mode, enabling collaboration opportunities among distant viewers. Because clients require no special hardware, the internet remote microscope is extremely accessible and easy to use, yet provides powerful remote inspection capabilities, collaboration opportunities, and easy access to hard to reach locations such as clean room environments for semiconductor processing.© (1996) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.