Fabrication Property of Medical Nebulizer Pt Mesh by Using Electron Cyclotron Resonance Ar-ion Milling

Authors :: Myung-Cheon Ahn
Kimin Hong
Purevdorj Khajidmaa
Won-Hyung Lee
Sang-Suk Lee
Cheol-Woo Park
Munkhbat Bolormaa
Source :: New Physics: Sae Mulli. 65:1074-1080
Publication Year :: 2015
Publisher :: Korean Physical Society, 2015.

Subjects :: Nebulizer
Fabrication
business.industry
Chemistry
law
Analytical chemistry
General Physics and Astronomy
Optoelectronics
Ion milling machine
Photolithography
business
Electron cyclotron resonance
law.invention

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