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Thinning of the Backside of the InSb(100) Matrix Module and Its Effect on the Crystal Structure of Near Surface Layers
- Source :
- Journal of Communications Technology and Electronics. 67:313-318
- Publication Year :
- 2022
- Publisher :
- Pleiades Publishing Ltd, 2022.
Details
- ISSN :
- 15556557 and 10642269
- Volume :
- 67
- Database :
- OpenAIRE
- Journal :
- Journal of Communications Technology and Electronics
- Accession number :
- edsair.doi...........77f683362b9561d12f157c3350942c39
- Full Text :
- https://doi.org/10.1134/s1064226922030111