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Thinning of the Backside of the InSb(100) Matrix Module and Its Effect on the Crystal Structure of Near Surface Layers

Authors :
E. V. Mirofyanchenko
A. E. Mirofyanchenko
V. S. Popov
Source :
Journal of Communications Technology and Electronics. 67:313-318
Publication Year :
2022
Publisher :
Pleiades Publishing Ltd, 2022.

Details

ISSN :
15556557 and 10642269
Volume :
67
Database :
OpenAIRE
Journal :
Journal of Communications Technology and Electronics
Accession number :
edsair.doi...........77f683362b9561d12f157c3350942c39
Full Text :
https://doi.org/10.1134/s1064226922030111