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Alignment and Micro-Displace Measurement with Four-Quadrant Photo-Detector by System Modeling
- Source :
- Chinese Journal of Lasers. 36:746-751
- Publication Year :
- 2009
- Publisher :
- Shanghai Institute of Optics and Fine Mechanics, 2009.
Details
- ISSN :
- 02587025
- Volume :
- 36
- Database :
- OpenAIRE
- Journal :
- Chinese Journal of Lasers
- Accession number :
- edsair.doi...........77868d93c09596713ecf61824df7421c