Thermal Decomposition Study of Dimethylaminoethanol on Si(100) by TPD and AES

Thermal decomposition and desorption of dimethylaminoethanol [dmaeH, ( CH 3)2 NC 2 H 4 OH ] on Si(100) was studied using temperature-programmed desorption (TPD) and Auger electron spectroscopy (AES). During heating of the sample up to 1100 K, methyliminoacetaldehyde, ethylene, carbon monoxide and hydrogen molecule were desorbed as the main desorption products from dmaeH on Si(100). After TPD experiments, carbon and nitrogen were detected by AES, indicating that complete decomposition of dmaeH also proceeded on Si(100).