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Structural and electrical properties of Dy and Ta co-substituted (Hf, Zr)O2 ceramics as a novel high-k dielectric for logic and memory devices

Authors :
Sachin Mishra
Gulshan Kumar
Reji Thomas
Urvashi Sharma
Dillip K. Pradhan
Source :
IOP Conference Series: Materials Science and Engineering. 872:012145
Publication Year :
2020
Publisher :
IOP Publishing, 2020.

Details

ISSN :
1757899X
Volume :
872
Database :
OpenAIRE
Journal :
IOP Conference Series: Materials Science and Engineering
Accession number :
edsair.doi...........7749eb69a1e24a4f92a2334eccc36bf1
Full Text :
https://doi.org/10.1088/1757-899x/872/1/012145