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Structural and electrical properties of Dy and Ta co-substituted (Hf, Zr)O2 ceramics as a novel high-k dielectric for logic and memory devices
- Source :
- IOP Conference Series: Materials Science and Engineering. 872:012145
- Publication Year :
- 2020
- Publisher :
- IOP Publishing, 2020.
Details
- ISSN :
- 1757899X
- Volume :
- 872
- Database :
- OpenAIRE
- Journal :
- IOP Conference Series: Materials Science and Engineering
- Accession number :
- edsair.doi...........7749eb69a1e24a4f92a2334eccc36bf1
- Full Text :
- https://doi.org/10.1088/1757-899x/872/1/012145