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[Untitled]
- Source :
- Journal of Microscopy.
-
Abstract
- We analyse the signal formation process for scanning electron microscopic imaging applications on crystalline specimens. In accordance with previous investigations, we find nontrivial effects of incident beam diffraction on the backscattered electron distribution in energy and momentum. Specifically, incident beam diffraction causes angular changes of the backscattered electron distribution which we identify as the dominant mechanism underlying pseudocolour orientation imaging using multiple, angle-resolving detectors. Consequently, diffraction effects of the incident beam and their impact on the subsequent coherent and incoherent electron transport need to be taken into account for an in-depth theoretical modelling of the energy- and momentum distribution of electrons backscattered from crystalline sample regions. Our findings have implications for the level of theoretical detail that can be necessary for the interpretation of complex imaging modalities such as electron channelling contrast imaging (ECCI) of defects in crystals. If the solid angle of detection is limited to specific regions of the backscattered electron momentum distribution, the image contrast that is observed in ECCI and similar applications can be strongly affected by incident beam diffraction and topographic effects from the sample surface. As an application, we demonstrate characteristic changes in the resulting images if different properties of the backscattered electron distribution are used for the analysis of a GaN thin film sample containing dislocations.
- Subjects :
- 010302 applied physics
Physics
Histology
Reflection high-energy electron diffraction
business.industry
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
Pathology and Forensic Medicine
Optics
Electron diffraction
0103 physical sciences
Scanning transmission electron microscopy
Energy filtered transmission electron microscopy
Electron beam-induced deposition
0210 nano-technology
business
High-resolution transmission electron microscopy
Kikuchi line
Electron backscatter diffraction
Subjects
Details
- ISSN :
- 00222720
- Database :
- OpenAIRE
- Journal :
- Journal of Microscopy
- Accession number :
- edsair.doi...........7679c29962ca6ae9daf101c5c575d3de