SUB-MICRON PATTERNING TITANIUM NITRIDE BY FOCUSED ION-BEAM TECHNIQUE

MLA

Chee-Yoon Yue, et al. “Sub-Micron Patterning Titanium Nitride by Focused Ion-Beam Technique.” International Journal of Computational Engineering Science, Sept. 2003, pp. 501–04. EBSCOhost, https://doi.org/10.1142/s1465876303001617.

APA

Chee-Yoon Yue, Mary B. Chan-Park, Dongzhu Xie, Jianxia Gao, & Bryan Kok Ann Ngoi. (2003). Sub-Micron Patterning Titanium Nitride by Focused Ion-Beam Technique. International Journal of Computational Engineering Science, 501–504. https://doi.org/10.1142/s1465876303001617

Chicago

Chee-Yoon Yue, Mary B. Chan-Park, Dongzhu Xie, Jianxia Gao, and Bryan Kok Ann Ngoi. 2003. “Sub-Micron Patterning Titanium Nitride by Focused Ion-Beam Technique.” International Journal of Computational Engineering Science, September, 501–4. doi:10.1142/s1465876303001617.