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A TEM study of local non-uniformities in epitaxial 2H-AIN films on Si(111) substrate
- Source :
- Journal of Electron Microscopy. 48:545-554
- Publication Year :
- 1999
- Publisher :
- Oxford University Press (OUP), 1999.
Details
- ISSN :
- 14779986 and 00220744
- Volume :
- 48
- Database :
- OpenAIRE
- Journal :
- Journal of Electron Microscopy
- Accession number :
- edsair.doi...........763186f6a0a45cfb9e882050406d7643