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Grating technology for topography measurement of curved surfaces

Authors :
Cai-Xian Yao
Tiebang Xie
Zhu Li
Xiangqian Jiang
Source :
SPIE Proceedings.
Publication Year :
1993
Publisher :
SPIE, 1993.

Abstract

In this paper a new grating technology for topography measurement of the curved surface is described. It adopts a laser-grating interferometry sensing system whose standard depends on the RCHD grating constant. The optical principle and system characteristics are discussed in detail. The results of principle experiment are given. Key words: Topography measurement of curved surface laser-grating interferometry sensing system grating interferometry reflective cylindric holographic diffractive (RCHD) grating

Details

ISSN :
0277786X
Database :
OpenAIRE
Journal :
SPIE Proceedings
Accession number :
edsair.doi...........761c55c7b110bf5bc0b62f4622a11f04
Full Text :
https://doi.org/10.1117/12.156502