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Grating technology for topography measurement of curved surfaces
- Source :
- SPIE Proceedings.
- Publication Year :
- 1993
- Publisher :
- SPIE, 1993.
-
Abstract
- In this paper a new grating technology for topography measurement of the curved surface is described. It adopts a laser-grating interferometry sensing system whose standard depends on the RCHD grating constant. The optical principle and system characteristics are discussed in detail. The results of principle experiment are given. Key words: Topography measurement of curved surface laser-grating interferometry sensing system grating interferometry reflective cylindric holographic diffractive (RCHD) grating
Details
- ISSN :
- 0277786X
- Database :
- OpenAIRE
- Journal :
- SPIE Proceedings
- Accession number :
- edsair.doi...........761c55c7b110bf5bc0b62f4622a11f04
- Full Text :
- https://doi.org/10.1117/12.156502