Study of LTCC-GEM gain properties

Low Temperature Co-fired Ceramic (LTCC) is an insulator and has been used for electronic circuit boards. The features of LTCC are good electric discharge resistance and high rigidity. A GEM foil using LTCC is expected not to be broken by an electric discharge. The manufactured LTCC-GEM has a hole area of 100 × 100 mm2, the hole diameter is 100 µm, and the hole pitch is 200 µm. We have measured the performance with respect to the gain properties of 200 µm thick LTCC-GEM with 55Fe X-ray. In the measurement, the gain achieved was about 2000 for three gases, ArCO2 (Ar:CO2 = 70:30), P10 (Ar:CH4 = 90:10) and T2K (Ar:CF4:iC4H10 = 95:3:2), and the long-term (100 hours) fluctuation was within 6%. And when the 100 × 100 mm2 LTCC-GEM hole area was divided into 10× 10 mm2, the gain uniformity of the entire region was estimated to be 12%.