Back to Search Start Over

Resolution of spreading-resistance measurements on shallow layers

Authors :
A. Brunnschweiler
Shahid Abbas Abbasi
Source :
Electronics Letters. 15:290
Publication Year :
1979
Publisher :
Institution of Engineering and Technology (IET), 1979.

Abstract

The limited spatial resolution of spreading-resistance measurements made on shallow diffused layers is demonstrated both experimentally and theoretically. This effect seems to have been overlooked in the literature and may account for the discrepancies that are sometimes observed in profiles derived from spreading-resistance data obtained from bevelled surfaces.

Subjects

Subjects :
Optics
Materials science
Spreading resistance profiling
business.industry
Resolution (electron density)
Materials testing
Electrical and Electronic Engineering
business
Image resolution
Bevel

Details

ISSN :
00135194
Volume :
15
Database :
OpenAIRE
Journal :
Electronics Letters
Accession number :
edsair.doi...........75b9c63f384678f2ee3035a2dd77a998
Full Text :
https://doi.org/10.1049/el:19790207
Full Text Access
View/download PDF

Tools

Authors Abstract Subjects Details