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Material and Structure Optimization of Substrate Support for Improving CVD Equipment Up Time

Authors :
Ram Woo
Won Kyung Kim
Source :
Korean Journal of Materials Research. 29:670-676
Publication Year :
2019
Publisher :
The Materials Research Society of Korea, 2019.

Subjects

Subjects :
Materials science
Chemical engineering
General Materials Science
Substrate (printing)

Details

ISSN :
22877258 and 12250562
Volume :
29
Database :
OpenAIRE
Journal :
Korean Journal of Materials Research
Accession number :
edsair.doi...........74b45221496639c902ab69b4b8e3662f
Full Text :
https://doi.org/10.3740/mrsk.2019.29.11.670
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