Three-Dimensional Observation of Edge-Roughness on Poly-Si/TiN Stacked Gate Using Three-Dimensional STEM

Authors :: Miyuki Yamane
Y Ohji
Masanari Koguchi
Hiroshi Kakibayashi
A Katakami
M Miyakawa
Shiano Ono
J Yugami
Mitsuo Ogasawara
Source :: Microscopy and Microanalysis. 15:634-635
Publication Year :: 2009
Publisher :: Oxford University Press (OUP), 2009.
Abstract: Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Subjects :: Materials science
chemistry
business.industry
chemistry.chemical_element
Optoelectronics
Surface finish
Edge (geometry)
Tin
business
Instrumentation

Tools