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Chemical solution processing and patterning with additive deposition of functional ceramics on planar and nonplanar surfaces
- Source :
- Solid State Ionics. 151:53-60
- Publication Year :
- 2002
- Publisher :
- Elsevier BV, 2002.
-
Abstract
- The chemical solution processing of dense insulating electroceramic thin layers is described with emphasis on the patterning of device structures. A review is presented for a wide range of patterning techniques and details are given for new additive methods based on soft lithography.
Details
- ISSN :
- 01672738
- Volume :
- 151
- Database :
- OpenAIRE
- Journal :
- Solid State Ionics
- Accession number :
- edsair.doi...........73970b945aa18a9be13351d32b10062e
- Full Text :
- https://doi.org/10.1016/s0167-2738(02)00607-0