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Metal impurities at the SiO2–Si interface

Authors :
K Honda
T Nakanishi
A Ohsawa
N Toyokura
Publication Year :
2021
Publisher :
CRC Press, 2021.

Details

Database :
OpenAIRE
Accession number :
edsair.doi...........731c45732306ef3b2699c35d0a7205cf
Full Text :
https://doi.org/10.1201/9781003069621-74