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Ferroelectric orthorhombic HfO2 phase in 3-layer memory structures of control HfO2 / floating gate of Ge nanoparticles in HfO2 / tunnel HfO2 on Si wafers
- Publication Year :
- 2021
Details
- Language :
- English
- Database :
- OpenAIRE
- Accession number :
- edsair.doi...........719b7404a1f5f71849b4ce865c52fd1e
- Full Text :
- https://doi.org/10.13140/rg.2.2.18939.44323