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Chemical structure change of thin films prepared from nonpolymeric organic compounds by pulsed laser deposition

Authors :
Masafumi Yoneda
Yoshihiro Tange
Tetsuo Yano
Osamu Tanaka
Toshihiko Ooie
Matsuda Hideaki
Yoshifumi Suzaki
Takahiro Kajitani
Munehide Katsumura
Source :
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 18:2359
Publication Year :
2000
Publisher :
American Vacuum Society, 2000.

Abstract

Thin films from six kinds of nonlinear optical nonpolymeric organic compounds were prepared by pulsed laser deposition (PLD) using a KrF excimer laser (248 nm) at various fluences up to 50 mJ/cm2. Changes in the chemical structure of the films with changes in fluence were studied. The experimental results show that for every compound at least minor decomposition has already started at the threshold fluence for deposition. More serious degradation occurs with increasing fluences, and little of the original chemical structure remains in films prepared by PLD at a fluence of 50 mJ/cm2.

Details

ISSN :
07342101
Volume :
18
Database :
OpenAIRE
Journal :
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Accession number :
edsair.doi...........70bf10c230399e2a6d275260df694f45
Full Text :
https://doi.org/10.1116/1.1289695