Selection of kinetic energy of laser ablated particles

Controlling the kinetic energy of deposition species is an effective way to improve thin film's physical properties. An apparatus that can select the kinetic energy of laser ablated particles was developed. It was demonstrated that the energy of laser ablated particle was selected by chopping with the slit of rotating disk. This apparatus was applied to thin film deposition and it was useful to improve surface morphology because the number of droplets on the film drastically decreased.