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A sensor-based analytic approach for predictions of nanomachined surface profile variations via capturing temporal-spectral Acoustic Emission (AE) features for vibration-assisted Atomic Force Microscopic (AFM) based nanopatterning
- Source :
- Surface Engineering and Forensics.
- Publication Year :
- 2023
- Publisher :
- SPIE, 2023.
Details
- Database :
- OpenAIRE
- Journal :
- Surface Engineering and Forensics
- Accession number :
- edsair.doi...........6fa28e01b58b1ecf153c2a513485bd16
- Full Text :
- https://doi.org/10.1117/12.2658809