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Optimized Analysis of Sensitivity and Non-Linearity for PDMS–Graphene MEMS Force Sensor
- Source :
- IETE Journal of Research. 68:4453-4467
- Publication Year :
- 2020
- Publisher :
- Informa UK Limited, 2020.
-
Abstract
- The aim of this paper is to analyze and evaluate the sensitivity and non-linearity of graphene piezoresistive MEMS force sensor by optimizing its geometrical parameters. In this work, important fac...
- Subjects :
- Microelectromechanical systems
Flexibility (engineering)
Materials science
business.industry
Graphene
020208 electrical & electronic engineering
Work (physics)
Non linearity
020206 networking & telecommunications
02 engineering and technology
Piezoresistive effect
Force sensor
Computer Science Applications
Theoretical Computer Science
law.invention
law
0202 electrical engineering, electronic engineering, information engineering
Optoelectronics
Sensitivity (control systems)
Electrical and Electronic Engineering
business
Subjects
Details
- ISSN :
- 0974780X and 03772063
- Volume :
- 68
- Database :
- OpenAIRE
- Journal :
- IETE Journal of Research
- Accession number :
- edsair.doi...........6f59f13c0a1d3fba676bbe824fc02589
- Full Text :
- https://doi.org/10.1080/03772063.2020.1795937